Recent progress in Ga2O3 power devices
نویسندگان
چکیده
This is a review article on the current status and future prospects of the research and development on gallium oxide (Ga2O3) power devices. Ga2O3 possesses excellent material properties, in particular for power device applications. It is also attractive from an industrial viewpoint since large-size, high-quality wafers can be manufactured from a single-crystal bulk synthesized by melt–growth methods. These two features have drawn much attention to Ga2O3 as a new wide bandgap semiconductor following SiC and GaN. In this review, we describe the recent progress in the research and development on fundamental technologies of Ga2O3 devices, covering single-crystal bulk and wafer production, homoepitaxial thin film growth by molecular beam epitaxy and halide vapor phase epitaxy, as well as device processing and characterization of metal–semiconductor field-effect transistors, metal–oxide–semiconductor field-effect transistors and Schottky barrier diodes.
منابع مشابه
Work Function Engineering of Functionally Graded ZnO+Ga2O3 Thin Film for Solar Cell and Organic Light Emitting Diodes Applications
ZnO+Ga2O3 functionally graded thin films (FGTFs) were examined for their potential use as Solar cell and organic light emitting diodes (OLEDs). FGTF transparent conducting oxides (TCO) were fabricated by combinatorial RF magnetron sputtering. The composition gradient was controlled up to 10% by changing the plasma power of the two sputter guns. A Ga2O3+ZnO graded region was placed on the top la...
متن کامل“Study of stable gallium oxide heavey metal Ga2O3-Bi2O3-PbO system glasses proposed as a base for optically noble glazes and enamels”
Ultra optical glasses are proposed for attaining noble glazes of high reflection and shine. In addition, these glasses can be used as semi-mirrors and optical instruments. In this reseach attempts were devoted mainly to introduce a glass system with the highest possible refractive index in which the highest reflection is desirable. Thus different amounts of heavy metal oxides modifiers, such as...
متن کاملPhotonic Materials and Devices
Our recent advances in solid-state optoelectronic materials and devices will be reviewed. In the area of glass optics, fabrication of novel microstructured and multi-core fibers and their use in realizing single mode lasers will be summarized. In organic and plastic optics, photorefractive polymers for 3D display applications and nonlinear optical polymers for high speed modulators in RF photon...
متن کاملDispersion and Nonlinearity in Ultra-Optical Ga2O3 and TiO2-Bi2O3-PbO Glass Systems
Dispersion, as the characteristic variation of refractive index with wavelength, is more pronounced, where the wavelength is approaching to the absorption band. In ultra-optical glasses, the nonlinear refractive index, concerning to the light intensity dependent phenomenon, becomes considerable. Here, two ultra-optical property glass systems; TiO2-Bi2O3-PbO (TBP...
متن کامل